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Internal Controller IRC 331
External Controller IRC 331 ex
- Suitable for IWH Series 1, IWH HD Series 2, IVR Series, Dual Arm series
- Control of incremental and absolute encoders
- 3 + 1 axes, upgradable
- 14 inputs, 13 outputs
- RS-232 and Ethernet communication interfaces
- Robot Control Center (RCC) software
- Dimensions: 480 x 180 x 150 mm
- Options:
- I/O extensions
- Hand terminal
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Figure.:
IRC 331ex |
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| Wafer Mapping Sensors IMS |
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| IMS-EX43(73)QS |
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- Laser class 1 light source
- Measuring distance 38 / 56 mm (1,5" / 2,2”)
- Sensor flexibly configurable
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IMS-MDW1
- LED light source
- Measuring distance 45 mm (1,75")
- PNP / NPN switchable
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| Other Accessories |
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| Flip Module IFM-300-3 |
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- Accurate flipping of wafers with most precise
- positioning by means of positive stops
- Universal end effector adapter
- Mapping sensor
- DC Motor with transmission unit
- Electrical end-of-travel damping
- Continuously variable speeds
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| Hand Terminal IHT |
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- Optimal support when teaching an isel wafer handler
- Keyboard layout optimized for isel wafer handlers
- Terminal function
- Teach function
- Diagnosis function
- RS-485
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 Further information, datasheets as well as technical documentations on request. |
Accessories for Wafer Handling