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Internal Controller
- IWH series 1, IWH-HD series 2, IVR series, prealigners
- Control of incremental encoders
- 3+1 axes
- 4 inputs, 3 outputs
- RS232 and Ethernet communication
- RCC software
- Optional:
- I/O extension
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Internal controller
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External Controller
- Vacuum Robots, Dual Arm Robots, IWH Series 4
- Compact, pre-integrated networkable & I/O control
- 6+2 axes
- 32 digital inputs, 14 digital outputs
- Autotuning, autocalibration, DWC, adaptive control
- Total Graphics GUI
- Semiconductor Toolkit Software
- Dimensions: 285 x 219 x 81 mm
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Semiconductor Toolkit software screenshot |
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External controller |
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Internal Controller IRC 331
External Controller IRC 331 ex
- Suitable for IWH Series 1, IWH HD Series 2, IVR Series, Dual Arm series
- Control of incremental and absolute encoders
- 3 + 1 axes, upgradable
- 14 inputs, 13 outputs
- RS-232 and Ethernet communication interfaces
- Robot Control Center (RCC) software
- Dimensions: 480 x 180 x 150 mm
- Options:
- I/O extensions
- Hand terminal
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Semiconductor Toolkit software screenshot |
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Figure.:
IRC 331ex |
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| Wafer Mapping Sensors IMS |
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| IMS-EX43(73)QS |
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- Laser class 1 light source
- Measuring distance 38 / 56 mm (1,5" / 2,2”)
- Sensor flexibly configurable
Item-No. 250061 0017 ( Measuring distance 38 mm)
Item-No. 250061 0019 ( Measuring distance 56 mm)
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IMS-MDW1
- LED light source
- Measuring distance 45 mm (1,75")
- PNP / NPN switchable
Item-No. 250061 0005
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| Other Accessories |
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| Flip Module IFM-300-2 |
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- Accurate flipping of wafers with most precise
- positioning by means of positive stops
- Universal end effector adapter
- Mapping sensor
- DC Motor with transmission unit
- Electrical end-of-travel damping
- Continuously variable speeds
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| Hand Terminal IHT |
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- Optimal support when teaching an isel wafer handler
- Keyboard layout optimized for isel wafer handlers
- Terminal function
- Teach function
- Diagnosis function
- RS-485
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 Further information, datasheets as well as technical documentations on request. |
Accessories for Wafer Handling