| IEE-Series |
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| Characteristics |
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Horse shoe
with Scanner |
- Characteristics
- For wafer sizes up to 12" (300 mm)
- Modular concept
- Low own weight
- Good cost/performance ratio
- PTFE coated
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| Options |
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Horse Shoe
without scanner |
- Diverse wafer mapping
sensors
- Several surface coatings
- Special designs
- Pocket EE
- Friction EE
- Edge Grip EE
- Exclusion zone Grip EE
- Exclusion zone Vacuum EE
- Multiple EE
- Thru Beam EE
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| Accesory - Vacuum Control |
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Exclusion Zone
Vacuum
with scanner |
- Extremeley fast response
- Freely programmable
- Resolution of 0.001 bar
- Built-in end effector
- Bicoloured display
- Useable for all vacuum
end effectors
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Edge Grip
with scanner |
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Double
with thru beam
scanner |
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End
Effectors
