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Three axis prealigner LPA Series with
side-entry cable configurations
and KALREZ Pin/Chuck
Single axis prealigner LPA Series with
bottom or side- entry cable configuration |
| Prealigner (Three-axis prealigners) |
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- Innovative all-in-one design
- Alignment cycle time <3.5 Seconds
- Repeating accuracy
linear. ±0.025 mm, circular ± 0.05°
- Contactless measuring via LED and CCD sensor
- Integrated scan electronics
- Stand-alone capable
- Chuck- or pinload as well as wafer size changing
without mechanical changes
- Transparent, semi-transparent, punched and
opaque wafers alignable
- SEMI, flat und notch wafer specifications
- For wafer sizes from 2" up to 12"
- Bottom-entry and side-entry cable configurations
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| Characteristics (Single-axis prealigners) |
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- Alignment cycle time <2.5 Seconds
- Contactless measuring via LED and CCD sensor
- integrated scan electronics
- Chuck Load
- Wafer size changing without mechanical changes
- Transparent, semi-transparent, punched and
opaque wafers alignable
- SEMI, flat and notch wafer specifications
- For wafer sizes from 3" up to 12"
- Side-entry and back-entry cable configurations
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Description
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The LPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics.
The Prealigers are designed and manufactored by Logosol, Inc. USA and
isel Germany AG is an exclusive authorized distributor for Europe.
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Logosol, Inc
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| Ordering guide |
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| Prealigner Product Key as pdf file |
