Characteristics (Three-axis prealigners)
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Three axis prealigner LPA Series with back-entry cable configuration |
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Innovative all-in-one design |
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Alignment cycle time <3.5 Seconds |
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Repeating accuracy
linear. ±0.025 mm, circular ± 0.05° |
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Contactless measuring via LED and CCD sensor |
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Integrated scan electronics |
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Stand-alone capable |
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Available as single-axis and three-axis system |
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Chuck- or pinload as well as wafer size changing
without mechanical changes |
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Transparent, semi-transparent, punched and
opaque wafers alignable |
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SEMI, flat und notch wafer specifications |
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For wafer sizes from 2" up to 12" |
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Bottom-entry and side-entry cable configurations |
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| Characteristics (Single-axis prealigners) |
Single axis prealigner LPA Series with back-entry cable configuration
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Alignment cycle time <2.5 Seconds |
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Contactless measuring via LED and CCD sensor |
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integrated scan electronics |
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Chuck load |
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Wafer size changing without mechanical changes |
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Transparent, semi-transparent, punched and
opaque wafers alignable |
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SEMI, flat and notch wafer specifications |
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For wafer sizes from 3" up to 12" |
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Side-entry and back-entry cable configurations |
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| Description |
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Prealigner LPA Series
