Products Wafer-Handler Vertical Roboter - Series IVR
Wafer-Handling
Vertical Roboter - Series IVR
Excellent structural rigidity
Maximum speed >1 m/s
Z axis up to 3,000 mm
Optimal acceleration - user programable
Easy connection of a traversing axis to the robot controller
Real-time movement control
Very smooth operation - vibration free
Brushless, maintenance-free servo motors with low moment of inertia
Harmonic Drive® transmission with zero backlash
Various communication interfaces
MTBF > 50,000 hours
Description
The vertical robot series represents a high-quality compact design. By using robust-industry-proven components and by reducing the number of inter-connecting parts we were able to build a very rigid and dynamic robot system.
This new handling solution is suitable for trans-porting wafers and substrates. Extremely respon-sive low-inertia brushless motors, coupled with directly driven Harmonic Drive® transmissions guarantee precise and interference-proof arm movements.
The robust-industry-proven external servo controller with it's 32-bit real-time kernel provides for a seamless integration of traversing axes and other peripheries. This controller ensures smooth axis traversing along multiple path segments.
The controller supports RS-232, RS-485, Teach Pendant and Ethernet interfaces.
Enlarge picture
Example:
Custom solution with 1.200 mm axis length and lateral axis module
Further information, datasheets as well as technical documentations on request.
Wafer-Handler 
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