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Products Wafer Handler IWH F-3
 
Wafer-Handling Roboter

IWH F-3 with dual arm
 
Characteristics

  • Excellent structural rigidity
  • Wafer handling of up to 300 mm
  • Maximum reliability and precision
  • Easy connection of a linear track to the robot controller
  • Real time motion control
  • Very smooth running
  • Brushless, maintenance free servo motors with low inertia
  • Backlash free Harmonic Drive ® gears
  • Absolute Encoder
  • Various communication interfaces
  • Class 1 clean room compatible
  • MTBF:>50.000 operating hours
  • Including Robot Control Center
  
  Figure:
IWH F-3
 
 
 
Repeatability T ±0,02°
R ±0,03 mm
Z ±0,03 mm
Working Range Z 13” (330.2 mm)
radial 14.4" (365.8 mm)
theta 450°
Payload   max. 1.25 kg /arm
 
Max. Speed T 360°/s
R 1.100 mm/s
Z 425 mm/s
Power Supply 110 / 230 V AC
Main-Interface RS-232 [DB9],
Option: Ethernet [RJ-45]
Peripheral Interface RS-485 [RJ-45], RJ-11
Further information by request Further information, datasheets as well as technical documentations by request.
 

CONTACT


Europe
+49 (0) 6659-981-700
iselrobotikeurope@isel.com

Inquiry to iselRobotik