iselRobotik – Wafer-Handler

Products

Wafer Handler

IWH F-3

Wafer-Handler Robots
IWH F-3 with dual arm

Characteristics

Excellent structural rigidity
Wafer handling of up to 300 mm
Maximum reliability and precision
Easy connection of a linear track to the robot controller
Real time motion control
Very smooth running
Brushless, maintenance free servo motors with low inertia
Backlash free Harmonic Drive® gears
Absolute Encoder
Various communication interfaces
Class 1 clean room compatible
MTBF:>50.000 operating hours
Including Robot Control Center

Figure:
IWH F-3

Repeatability	T	±0,02°
	R	±0,03 mm
	Z	±0,03 mm

Working Range	Z	13” (330.2 mm)
	radial	14.4" (365.8 mm)
	theta	450°

Payload		max. 1.25 kg /arm

Max. Speed	T	360°/s
	R	1.100 mm/s
	Z	425 mm/s

Power Supply		110 / 230 V AC

Main-Interface		RS-232 [DB9], Option: Ethernet [RJ-45]

Peripheral Interface		RS-485 [RJ-45], RJ-11

Dimensions

Further information, datasheets as well as technical documentations by request.

isel Germany AG - Department Robotik / Bürgermeister-Ebert-Straße 40 / 36124 Eichenzell - Germany
Phone: +49 (0) 6659-981-700 / Fax: -776 / email: iselrobotikeurope@isel.com

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