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Wafer-Handler Robots
IWH F-1 with two-link arm
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Characteristics
- Excellent structural rigidity
- Maximum reliability and precision
- Top mounted (TA) or bottom mounted (BA) versions available
- Customized designs
- Optional internal or external controller
- Absolute (digital) or incremental encoder
- Seamless integration with prealigner, linear track and other periphal components
- Optional high-end controller for controlling complex systems
- Including Robot Control Center (RCC)
- Class 1 clean-room environment compatible
- Made in Germany
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Figure:
IWH TA10S10 F-1 |
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| Repeatability |
T |
±0,02° |
| R |
±0,03 mm |
| Z |
±0,03 mm |
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| Working
Range |
Z |
10", 13", 17" |
| radial |
10", 14" |
| theta |
450° |
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| Payload |
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0,75 Kg |
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| Max.
Speed |
T |
360°/s |
| R |
1000 mm/s |
| Z |
450 mm/s |
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| Power Supply |
110 / 230 V AC |
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| Main-Interface |
RS-232 [DB9],
Option: Ethernet
[RJ-45] |
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| Peripheral Interface |
RS-485 [RJ-45] |
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more information still to follow
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 Further information, datasheets as well as technical documentations by request. |
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Wafer
Handler
