Products Wafer
Handler IWH TA10S10 F-1 |
| |
Wafer-Handling Roboter
IWH F-1 with two-link arm |
| |
Characteristics
- Excellent structural rigidity
- Maximum reliability and precision
- Top mounted (TA) or bottom mounted (BA) versions available
- Customized designs
- Optional internal or external controller
- Absolute (digital) or incremental encoder
- Seamless integration with prealigner, linear track and other periphal components
- Optional high-end controller for controlling complex systems
- Including Robot Control Center (RCC)
- Class 1 clean-room environment compatible
- Made in Germany
|
|
 |
|
| |
|
Figure:
IWH TA10S10 F-1 |
| |
| |
| |
| Repeatability |
T |
±0,02° |
| R |
±0,03 mm |
| Z |
±0,03 mm |
|
| Working
Range |
Z |
10", 13", 17" |
| radial |
10", 14" |
| theta |
450° |
|
| Payload |
|
0,75 Kg |
|
|
| Max.
Speed |
T |
360°/s |
| R |
1000 mm/s |
| Z |
450 mm/s |
|
| Power Supply |
110 / 230 V AC |
|
| Main-Interface |
RS-232 [DB9],
Option: Ethernet
[RJ-45] |
|
| Peripheral Interface |
RS-485 [RJ-45] |
|
|
|
| |
 Further information, datasheets as well as technical documentations by request. |
|
