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Products Wafer Handler IWH TA10S16 F-1
 
Wafer-Handling Robots

IWH F-1 with three-link heavy duty arm and standard body
 
  Characteristics

  • Excellent structural rigidity
  • Maximum reliability and precision
  • Top mounted (TA) or bottom mounted (BA) versions available
  • Customized designs
  • Optional internal or external controller
  • Absolute (digital) or incremental encoder
  • Seamless integration with prealigner, linear track and other periphal components
  • Optional high-end controller for controlling complex systems
  • Including Robot Control Center (RCC)
  • ISO 14664-1 class 1 clean-room environment compatible
  • Made in Germany
   Wafer Handling Roboter
  Figure:
IWH TA10S16 F-1
 
 
 
Repeatability T ±0,02°
R ±0,03 mm
Z ±0,03 mm
Working Range Z 10", 13", 17"
radial 16", 21 ",24"
theta 450°
Payload   2,75 Kg
 
Max. Speed T 360°/s
R 1000 mm/s
Z 450 mm/s
Power Supply 110 / 230 V AC
Main-Interface RS-232 [DB9],
Option: Ethernet [RJ-45]
Peripheral Interface RS-485 [RJ-45], RJ-11
 
Further information by request Further information, datasheets as well as technical documentations by request.
 
 

CONTACT


Europe
+49 (0) 6659-981-790
iselrobotikeurope@isel.com

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