Single arm wafer handling robot
IWH-TA / IWH-BA series |
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Top mounted
isel single arm wafer handling robot
IWH-TA series
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Bottom mounted
isel single arm wafer handling robot
IWH-BA series
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Characteristics
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Excellent structural rigitidy |
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Handling of wafers and masks |
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Maximum reliability and precision |
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Easy connection of other peripheries to the robot controller |
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Z travel from 7” up to 21” |
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Arm length from10.5” up to 24” |
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Brushless, maintenance free servo motors with low inertia |
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Backlash-free Harmonic Drive® gears |
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Class 1 clean room compatible |
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MTBF:>50.000 operating hours |
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Modular concept with more than 150 standard configurations |
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Customized mechanics, electronics and software
adaptions possible |
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Description |
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These wafer handlers are an innovative design and are
class-1 clean room compatible. The modular concept guarantees a maximum of flexibility and capability.
These innovative handling solutions are designed to handle wafers and masks and feature extremely high precision and reliability.
Brushless motors with extreme high reaction capability, coupled with direct driven Harmonic Drive® gears guarantee precise, dynamic and trouble free arm movements.
The advanced servo controllers provide for a seamless integration of linear tracks and other peripherals. These advanced controllers ensure smooth running along multiple path segments.
The efficient wafer operation and script programing language provides for optimal emulation of third party software enabling the seamless integration of most semiconductor tools.
The control system supports RS-232 and Ethernet interfaces. |
Dual arm wafer handling robot
IWH-BA series |
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Bottom mounted
isel dual arm wafer handling robot
IWH-BA series
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Characteristics
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Excellent structural rigidity |
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Wafer handling of up to 300mm |
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Maximum reliability and precision |
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Easy connection of a linear track to the robot controller |
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Real time motion control |
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Very smooth running |
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Brushless, maintenance free servo motors with low inertia |
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Backlash free Harmonic Drive® gears |
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Absolute Encoder |
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Various communication interfaces |
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Class 1 clean room compatible |
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MTBF:>50.000 operating hours |
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Description |
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This robot is distinguished for it's durable, elegantly uncomplicated hardware design, it's sophisticated motion control system and interchangeable arms sets set aside for its competition.
It is engineered to handle wafers up to 300 mm with high precision and reliability. Brushless motors and absolute encoders with extreme high reaction capability, coupled with direct driven Harmonic Drive® gears guarantee precise and trouble free arm movements.
The motion controller with 64-bit real-time kernel allows a smooth integration of other peripherals. This controller provides smooth running along multiple path segments. The efficient wafer operation and script languages with optimal emulation of third party software allow the integration of various semiconductor tools. The control system supports RS-232 and Ethernet interfaces.
With a 6 axis motion controller and 50 high speed I/Os the robot easily can control multiple other applications like linear tracks and aligners. |
Wafer
Handler IWH
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