iselRobotik – Wafer-Handler

Products

Wafer Handler

Vacuum Series

Wafer-Handler Robots
IWH Vacuum Series

Characteristics		isel wafer handling robot IWH vacuum series

-	Industry standard footprint and mounting configurations
-	Wafer handling of up to 300 mm
-	High precision user configurable 14" and 18" arms
-	Maximum reliability and precision
-	Ferrofluidic vacuum seal
-	Vacuum levels at <5x10-9 Torr
-	Real time motion control
-	Very smooth running
-	Brushless, maintenance free servo motors with low inertia
-	Absolute encoders
-	Backlash free Harmonic Drive® gears
-	Various communication interfaces
-	Class 1 cleanliness
-	MTBF:>50.000 operating hours

Description

This vacuum robot is distinguished for it's durable, elegantly uncomplicated hardware design; it's sophisticated motion control system and interchangeable arms sets set aside for its competition.

It is engineered to handle wafers up to 300 mm with high precision and reliability. Brushless motors and absolute encoders with extreme high reaction capability, coupled with direct driven Harmonic Drive® gears guarantee precise and trouble free arm movements.

The motion controller with 64-bit real-time kernel allows a smooth integration of other peripherals. This controller provides smooth running along multiple path segments. The efficient wafer operation and script languages with optimal emulation of third party software allow the integration of various semiconductor tools. The control system supports RS-232 and Ethernet interfaces.

With a 6 axis motion controller and 50 I/Os the robot easily can control multiple other applications like elevators and vacuum aligners.

Further information, datasheets as well as technical documentations on request.

isel Germany AG - Department Robotik / Bürgermeister-Ebert-Straße 40 / 36124 Eichenzell - Germany
Phone: +49 (0) 6659-981-700 / Fax: -776 / email: iselrobotikeurope@isel.com

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