|
Wafer-Handler
Overview
Characteristics
|
|
Top mounted:
isel wafer
handling robot
IWH-TA series |
| |
| - |
Innovative All-In-One design |
| - |
Excellent structural rigitidy |
| - |
Wafer and masks handling of up to 2.75 kg |
| - |
Maximum reliability and precision |
| - |
Easy connection of other peripheries to the robot controller |
| - |
Real time motion control |
| - |
Very smooth running |
| - |
Brushless, maintenance free servo motors with
low inertia |
| - |
Backlash free Harmonic Drive Gears |
| - |
Various communication interfaces |
| - |
Class 1 clean room compatible |
| - |
MTBF:>50.000 operating hours |
| |
Description
These wafer handlers are an innovative All-In-One design
and are class-1 clean room compatible.
They integrate the motion control, power amplifier and
power supply.
With this innovative method, there is no need for an external control and power unit. They are designed to handle wafers up to 300 mm and distinguish themselves with an extremely high precision and reliability. Brushless motors with extreme high reaction capability, coupled with direct driven Harmonic Drive® gears guarantee precise, dynamic and trouble free arm movements.
The advanced servo controller with 32-bit real-time kernel provides for a seamless integration of linear tracks and other peripherals. This advanced controller ensures smooth running along multiple path segments.
The efficient wafer operation and script programing language provides for optimal emulation of third party software enabling the seamless integration of most semiconductor tools.
The control system supports RS-232, RS-485, tech-pendant and Ethernet interfaces. |
| |
 Further information, datasheets as well as technical documentations on request. |
| |
| |
| Item Number Key |
 |
| Further information, datasheets as well as technical documentations on request. |
|
Wafer
Handler
